PYROELECTRIC TYPE INFRARED-RAY ARRAY SENSOR

摘要

PURPOSE:To decrease cross talk and to improve sensitivity, by forming upper electrodes as the group of a plurality of separated electrodes, covering one surface of the group of pyroelectric thin films with an organic thin film, and removing a part of a substrate corresponding to a light sensitive part. CONSTITUTION:An insulating thin film 2 is formed on a substrate 1 for array elements. A lower electrode thin film 3 and the group of pyroelectric thin films 4 are provided thereon. The group of a plurality of separated upper electrode thin films 5 is formed on the group of the pyroelectric thin films 4. At least one surface of the group of the pyroelectric thin films 4 is covered with an organic thin film 6. A part of the substrate 1 corresponding to a light sensitive part is removed. The organic thin film 6 is formed by applying light sensitive polyimide resin with a spinner and performing heat treatment at 200 deg.C by irradiation with ultraviolet rays. The organic thin film 6 such as this alleviates thermal stress between the pyroelectric film 4 and the substrate 1, decreases cross talk due to thermal diffusion and can improve the sensitivity.