| 摘要 |
PURPOSE:To recover the fine particles stuck to the wall surface of low temp. by providing an electric discharge mechanism to a thermophoresis type fine particle trap consisting of a low temp. wall and a high temp. wall, and subjecting the fine particles stuck to the wall surface of low temp. to plasma reaction. CONSTITUTION:The high and low temp. walls are provided on the thermophoresis type fine particle trap vessel 1 so as to stick the fine particles in the vacuum exhausting system to the low temp. wall. An electric discharge tube 20 is provided on a part of an inlet pipe 3 of the vessel 1, and connected to a high frequency electric power source. A cleaning gas introducing pipe 23 is connected to the inlet pipe 3. When the cleaning of fine particles stuck to the low temp. wall is necessary, a fluorine group gas is introduced from the cleaning gas introducing pipe. The introduced gas is changed to the plasma state of an activated state by the electric discharge, and is chemically reacted with the particles stuck to the wall surface of low temp. to gasify, which is recovered by a recovery device. |
