| 摘要 |
PURPOSE:To enhance a production yield rate of a ceramic package by a method wherein a graphite material whose coefficient of thermal expansion is within a specific extent is used so that a mismatch of the coefficient of thermal expansion between a ceramic substrate and a graphite jig can be prevented. CONSTITUTION:A coefficient of thermal expansion of a substrate mainly composed of Al2O3 for a ceramic package is 7.5X10<-6> deg.C<-1>-7.8X10<-6> deg.C<-1>; the coefficient of thermal expansion of a substrate mainly composed of AlN and of a substrate mainly composed of SiC is 4.5X10<-6> deg.C<-1>-4.9X10<-6> deg.C. Accordingly, if a graphite material whose coefficient of thermal expansion is within a range of 4.5X10<-6> deg.C<-1>-8.0X10<-6> deg.C<-1> and the coefficient of thermal expansion of a jig made of graphite is matched, the finishing dimensional accuracy of the package can be secured. By this setup, it is made possible to enhance a production yield rate of a brazing operation for the ceramic package.
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