| 摘要 |
PURPOSE:To produce the title long-sized and stable thin metal film without a crease on film by providing plural shielding plates between the polymeric film traveling along the periphery of a cylindrical can and a vaporization source, and in the vicinity of the end of the film. CONSTITUTION:The thin metal film is formed on the polymer film 1 traveling along the periphery of the cylindrical can 2 by using the electron beam vaporization source 5. In the vacuum deposition, a potential difference is applied between the can 2 and the film 1 by an electric power source 11 through a free roller 10 to improve the adhesion between the can 2 and the film 1. The first shielding plate 6 having an opening S is arranged between the vaporization source 5 and the can 2 to regulate the vapor 7 generated from the vaporization source 5. In addition, the second shielding plate 12 is arranged between the first shielding plate 6 and the can 2, and in the vicinity of the end of the film 1 to regulate the reflected electron from the electron beam vaporization source 5, and electrification is prevented. By this method, a large-sized and stable thin metal film without a crease is formed on the polymeric film 1 at a high deposition rate.
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