| 摘要 |
PURPOSE:To facilitate highly accurate control, by providing a voltage applying circuit for controlling the voltage such that a pair of piezoelectric elements displace by the same amount in the opposite directions, and taking out overlapped displacements. CONSTITUTION:A piezoelectric element A is bonded to a movable member 13 having (-) side secured to the upper portion of a static member 11 and (+) side supported through a spring 12 on the lower portion of the static member 11. (-) side of a piezoelectric element B is bonded to the upper face of the movable member 13 in parallel to the piezoelectric element A, and point Q at (+) side of the element B is employed as a point for taking out displacement. Voltage V of power source 100 is applied from a common terminal CT through a dividing resistor R onto (+) and (-) sides of respective piezoelectric elements A, B. Upon application of voltage onto a pair of piezoelectric elements A, B, the elements A, B displace by the same amount in the opposite directions so as to displace the point Q by an amount equivalent to overlapped displacements. Consequently, hysteresis is cancelled and the accuracy is improved. |
