发明名称 OXIDE SUPERCONDUCTING ELEMENT WAFER
摘要 PURPOSE:To provide an element wafer having a crystal layer comprising a multicomponent oxide superconductor by forming a crystal layer of the multicomponent oxide superconductor on a crystal substrate consisting of oxides of >=two kinds of metal element constituting the crystal layer. CONSTITUTION:For example, a soln. 22 contg. powder of Y2O3 and powder of CuO dissolved in a flux comprising a liquid mixture of BaCO3 and B2O3 is prepd. in a Pt crucible 21 of a liquid phase growth device. A BaCuO2 crystal substrate 23 held by a holder 25 provided to a tip end of a supporting rod 24 is allowed to contact with the soln. 22. Liquid epitaxial growth is proceeded while revolving the substrate 23 at high speed with a specified cooling rate. By this method, an epitaxial wafer having a uniform YBa2Cu3O7-delta single crystal layer formed with a specified thickness on the BaCuO2 crystal substrate is obtd.
申请公布号 JPS63310797(A) 申请公布日期 1988.12.19
申请号 JP19870145720 申请日期 1987.06.11
申请人 TOSHIBA CORP 发明人 TERAJIMA KAZUTAKA;FUKUDA KATSUYOSHI
分类号 C30B19/02;C30B29/22;H01B12/06;H01L39/12;H01L39/22;H01L39/24 主分类号 C30B19/02
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