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发明名称	METHOD FOR REPLACING CAPILLARY
摘要
申请公布号	JPS63197348(U)	申请公布日期	1988.12.19
申请号	JP19870088346U	申请日期	1987.06.08
申请人		发明人
分类号	H01L23/50;H01L21/66;(IPC1-7):H01L23/50	主分类号	H01L23/50
代理机构		代理人
主权项
地址

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