发明名称 DISCHARGE NOZZLE OF DEVICE FOR DISCHARGING PRECISE AND CONSTANT AMOUNT OF FLUID
摘要 PURPOSE:To stably discharge the constant amount fluid of single phase, two phases or three phases consisting of fluid or solid containing fluid by providing a guide with the fluid flows along it, in a discharge nozzle main body of the titled device. CONSTITUTION:In a device for discharging the precise and constant amount of fluid used for the fluid of single phase, two phases or three phases consisting of fluid or solid containing fluid, the guide 1 is provided in the discharge nozzles 2 main bodies and the lower ends 1a of the guides 1 is projected to the lower parts of the discharge nozzles 2 only in necessary length. As a result, the constant amount of the fluid can be stably discharged because the fluid is discharged along the guide and not turned onto the outer surfaces of the opening parts of the discharge nozzles 2 and therefore excess fluid is not supplied.
申请公布号 JPS63310657(A) 申请公布日期 1988.12.19
申请号 JP19870146351 申请日期 1987.06.12
申请人 NEC KYUSHU LTD 发明人 TAKADO TSUMORU
分类号 B05B1/00;B05C5/00;H01L21/027;H01L21/30 主分类号 B05B1/00
代理机构 代理人
主权项
地址