| 摘要 |
PURPOSE:To obtain a junction having excellent reproducibility and controllability and high performance and high quality by thermally treating the surface of a foundation electrode in a mixed gas containing oxygen as a pretreatment through which a tunnel barrier is formed. CONSTITUTION:The surface of a foundation electrode 2 is thermally treated in a mixed gas containing oxygen as a pretreatment through which a tunnel barrier 3 is shaped. The surface of the foundation electrode 2 is thermally treated in N2 or CnH2n+2 and a gas obtained by properly replacing H in CnH2n+2 with F, Cl or Br, or PCl3, BCl3, or SF6 or the mixed gas of these N2, CnH2n+2 and gas acquired by properly replacing H in CnH2n+2 with F, Cl, or Br and an inert gas such as Ar in order to shape the tunnel barrier 3. Accordingly, a junction having excellent reproducibility and controllability and high performance and high quality is acquired.
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