| 摘要 |
PURPOSE:To form an excellent ohmic electrode to measure electric characteristics for quality evaluation of a semiconductor, by putting an electrode material of definite shape on an semiconductor chip, and alloying it. CONSTITUTION:A base 6 is provided with a recessed part 8 for inserting a semiconductor chip 1, and a lid 7 is provided with a hole 9 in which an electrode material 10 of definite shape corresponding to a corner of the semiconductor chip can be inserted. From the hole 9, the electrode material 10 of definite shape is dropped down on a semiconductor chip 1 inserted into the recessed part 8, and mounted at a prescribed position. An alloy furnace is provided with a heating block 12 and a cooling block 13 in a furnace pipe 11, and constituted in the manner in which a jig conveying guide 14 can travel between both of the blocks. The semiconductor chip 1 mounting the electrode material 10 with an alloy jig, is carried from the cooling block 13 to the heating block 12 while being contained in a jig T. After the electrode is alloyed, it is carried in the cooling block 13 and rapidly cooled. An excellent ohmic electrode can be obtained by applying the alloy furnace F like this and only by alloying the electrode.
|
