| 摘要 |
PURPOSE:To improve the yield in manufacture of photosensor arrays, by composing each photosensor of two photosensor elements connected in series such that a transparent electrode layer of one of the photosensor elements is in contact with a metallic electrode layer of the other. CONSTITUTION:In a photosensor array 7, two adjacent photosensor elements 9, 9 are combined such that a transparent electrode layer 4 of one of the photosensor elements 9 is in contact with a metallic electrode layer 2 of the other photosensor element 9 and these two photosensor elements are connected in series to provide a photosensor 8. According to such construction, it is very rare that both of the photosensor elements 9, 9 constituting the photosensor 8 become defective when the photosensor array 7 is manufactured. Even if one of the photosensor elements 9 becomes defective by pin holes in an amorphous Si layer 3 for example, the other photosensor element 9 will operate normally. Further, since photoelectric current is not affected by voltages, no variance is caused in photoelectric characteristics of the photosensor array. Thus, the fraction defective caused by pin holes in the a-Si layer 3 or the like can be minimized and the yield of the photosensor arrays 7 can be improved.
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