| 摘要 |
PURPOSE:To avoid horizontal and axial looseness by providing a piezoelectric actuator between a bolt tightening a movable member and the movable member on a slider movably held on a track table through balls. CONSTITUTION:A rectilinear motion guide mechanism includes a slider 21 movably held on a track table 18 through balls 20 and a work table 16 tightened by a bolt 22 through a piezoelectric actuator 23 at a designed space L above the slider. When electric field is applied to the piezoelectric actuator 23 at need, the actuator is elongated in the longitudinal direction of the bolt and the recess portion of the slider 21 sags inward to be deformed, so that pre-load is given to the balls 20 between the slider 21 and the track table 18. Thus, the axial looseness of the track table and the lateral looseness intersecting perpendicularly thereto with respect to the work table can be avoided to increase rigidity. Furthermore, when pre-load is cancelled at the time of no-load feeding, the occurrence of disadvantages such as lowering of life and generation of heat can be restrained. |
