发明名称 AUTOMATIC INSPECTION/CORRECTION EQUIPMENT FOR FINE DEFECT IN PAINTED FILM
摘要 PURPOSE:To achieve a higher position accuracy in the quantitative determination and coating of a correction liquid and a higher speed of job, by analyzing the position of a defect and the type of color thereof from a detection data of the defect to apply the correction liquid of a specified color at the position of the defect according to the results. CONSTITUTION:A coating film panel 1 is formed by arranging dots colored in three primary colors reguiarly. A drive control section 7 provides a control signal to a driving section 3 to perform a scanning in a specified direction on a panel 1 with a defect detecting section 2 while providing a control signal to a drive section 6 so that a coater 5 reaches the position of a defect in the panel 1 according to the results of analysis from an analysis section 4. With such as arrangement, as a defect detecting section 2 detects a defect point with a color material lacking, a detection data is sent to the analysis section 4, which analyzes the position of a defect and the type of color thereof on the panel 1 from a data detected by the defect detecting section 2. When the coater 5 reaches the position of the defect point, a correction liquid of color analyzed is applied to the defect point.
申请公布号 JPS63308547(A) 申请公布日期 1988.12.15
申请号 JP19870145475 申请日期 1987.06.10
申请人 SHARP CORP 发明人 HARADA TOSHITA
分类号 G01N21/88;G03F1/84;H01L21/027;H01L21/30 主分类号 G01N21/88
代理机构 代理人
主权项
地址