| 摘要 |
PURPOSE:To enhance reliability and to eliminate a fine patterning by reducing the thicknesses of a stepped insulating layer and a thin superconducting film layer formed on the insulating layer. CONSTITUTION:A thin superconducting film layer S formed by sputtering or the like is provided on a stepped insulating layer I. A coverage is normally deteriorated according to the directivity of sputtering on the wall face of the step of the layer I, and thinned. Then, the layer S is planely patterned to form an element region. Such an element has a similar basic operation principle to that of a conventional weak coupling Josephson element, and its weak coupling can be formed in a longitudinal direction. Accordingly, this submicron size can be easily performed, and its integration can be improved. |
