| 摘要 |
PURPOSE:To prevent separation of diamond film and to achieve long service life and high performance with low cost by adding 0.5-20wt.% of metal conversion Fe to basic ceramic material such as sintered silicon nitride and the like and achieving thermal expansion factor of 2.8X10<-6>-6X10<-6>/ deg.C. CONSTITUTION:Basic material of tool is composed of about 88wt.% of Si3N4, about 4wt.% of Y2O3, about 6wt.% of Al2O3 and about 2wt.% of WC and 0.2-30wt.% in Fe metal conversion of Fe2O3 is added, then it is molded and sintered gas pressure so as to produce sintered material having density higher than 90%, ductility higher than about 5 and thermal expansion factor of 2.8X10<-6>-5X10<-6>/ deg.C. Then coated face is polished thinner than about lmum and a diamond film is formed through microwave plasma CVD. Thereafter, it is polished to predetermined surface coarseness and machined to have sharp edge.
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