| 摘要 |
PURPOSE:To improve controlling accuracy and rapid responsiveness and to reduce a control current upon reducing of thermal capacity by us as a tubular member a metal pipe on which a groove is formed on the inner wall face and the outer wall of which is electrically insulated and having good thermal conduc tivity. CONSTITUTION:A material (metal pipe) 1 is attache by brazing to a thermally insulating base plate 2 made of a thermally insulating member, only hydrogen molecule flow is passed through the material 1, it is covered with a tubular member 3 in which the flow rate of the passed hydrogen molecules can be controlled by a temperature, its collar 3a is clamped by a clamping screw 4 to the base plate 2, and a heater 5 for controlling the temperature of the exte rior (outer periphery) of the member 3 formed with a groove on its inner wall is wound thereon. Here, the member 3 is formed of a metal pipe having good thermal conductivity, and an insulating film was formed by treating aluminum to form 'Alumite(R)'. This hydrogen flow rate control valve can control the hydrogen flow rate control valve pressure of the same degree as or larger than that of a conventional one with less heating current. |
