| 摘要 |
<p>PURPOSE:To improve positioning accuracy by coating a driving part ball screw in an X, Y axis positioning unit movable structure with bellows so that dust or the like is prevented from adhering to this ball screw. CONSTITUTION:Placing a workpiece on the upper central part of an XY axis positioning unit movable structure 1 and rotating a ball screw 3 by driving a servomotor 6, a machine moves this movable structure 1 to an optional position performing positioning of the workpiece. Here the machine, which freely extends and contracts a bellows 10 covering the ball screw 3 by moving this movable structure 1, prevents a dust or the like from adhering to the ball screw 3 by this bellows 10. As the result, the machine, which can avoid a nut and the ball screw 3 from being damaged by dust or the like, enables the workpiece to enhance its positioning accuracy.</p> |
