| 摘要 |
PURPOSE:To always effect crystal growth in the sealing liquid to increase the quality and yield of Chokralsky single crystals by introducing the sealing liquid from another vessel into the crucible, as the crystal grows. CONSTITUTION:In the liquid-sealing type Chokralsky method, a crucible for crystal growth 1 containing the compound semiconductor melt 2 and the sealing liquid 3 is prepared. Separately from the crucible 1, another vessel 7 is prepared to include the sealing liquid 8. The sealing liquid 8 is gradually melted as the crystal 6 grows. Thus, the thickness of the sealing liquid 3 is increased in the crucible 1 to allow the crystal 6 to grow always in the sealing liquid 6.
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