| 摘要 |
<p>PURPOSE:To contrive stabilization of product purity regardless of fluctuation in operating condition by seasons, days and nights, etc., by comparing detected purity values of O2 component gas before introduction into a product holder with the set value thereof and circulating the quantity according to the deviation to a pressure accumulation step when the former is low. CONSTITUTION:A valve 91 is closed to open valves 32 and 63 and an O2 compressor 61 is operated to discharge O2 component gas recovered in an O2 receiver 31 to a pipeline 6. When the purity of the O2 component gas is same as or higher than the set O2 purity value preset in a controlling means 92, the valve 91 is kept closed and the O2 component gas is then fed to a holder 7 and accumulated as product O2. When the purity of the O2 component gas is lower than the above-mentioned set value, the valve 91 is opened so as to provide an opening degree proportional to the deviation value and the O2 component gas in a volume corresponding to the opening degree is returned to the O2 receiver 31. Thereby the volume of the O2 component gas in the receiver 31 is increased and the gas is passed through a gas feed passage 5 for pressure accumulation and used as a pressure accumulating gas in an adsorption column 2 after desorption.</p> |
