| 摘要 |
PURPOSE:To three-dimensionally detect the space distribution of a phase object by constituting the titled microscope in such a manner that the light past a slit is detected by split detectors and three-dimensional information is obtd. when a sample is moved in an optical axis direction. CONSTITUTION:This microscope is provided with the slender aperture-shaped slit 21 provided in the focusing position by a condenser lens 19 and the split detectors 21, 23 which have a boundary in the direction perpendicular to the longitudinal direction of the slit 21 and detects the light past the slit 21, etc. The phase information differentiated in the longitudinal direction of the slit aperture is detected if the differential output is obtd. by using the detectors 21, 23. The phase information of the prescribed region of the object is, therefore, detected if the object is scanned by moving a stage or deflecting the light beam. The three-dimensional information is obtainable if the sample is moved in the optical axis direction. The sample in which the phase object is three- dimensionally distributed is thereby three-dimensionally visualized.
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