发明名称 |
ORGANIC THIN FILM AND FORMATION |
摘要 |
PURPOSE:To prevent thermal decomposition of organic substance at a time of vapor deposition and to enhance the orientation properties and crystallizability of a thin film by dropping the prescribed amount of the organic substance on a previously heated vapor deposition boat and quickly evaporating it in vacuum and vapor-depositing it to form the organic thin film. CONSTITUTION:The inside of a vacuum tank is regulated to about 10<-8>Torr degree of vacuum and Al is vapor-deposited at about thousands Angstrom on a glass base plate 1 in a preliminary chamber 6 with a resistance heating vapor deposition device 2. Then after introducing oxygen and forming aluminum oxide with glow discharge, it is transferred to a formation chamber 5 of an organic thin film. Then argon atomic beams are subjected to impulse toward the base plate for vapor deposition from a generator of the atomic beams for shocking the base plate. The powder of N-salicylideneaniline-3-carboxylic acid is allowed to fall on a heated tungsten boat from a falling device 7 of organic substance and all amounts are quickly evaporated. Then after returning the base plate to the preliminary chamber 6, a lead electrode is vapor-deposited by using the resistance heating vapor deposition device 2. |
申请公布号 |
JPS63305933(A) |
申请公布日期 |
1988.12.13 |
申请号 |
JP19870139858 |
申请日期 |
1987.06.05 |
申请人 |
NIPPON TELEGR & TELEPH CORP <NTT> |
发明人 |
EBISAWA FUMIHIRO;HORIUCHI TSUTOMU;TABEI HISAO;SUKEGAWA TAKESHI |
分类号 |
B01J19/08;C08F38/00;C23C14/12;C23C14/24;C30B29/54;H01L21/363;H01L51/05;H01L51/40 |
主分类号 |
B01J19/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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