| 摘要 |
PURPOSE:To prevent an object to be treated from coming into contact with the side walls of a slit seal part, by providing a device for preventing the object from meandering on the upstream side of a preliminary vacuum chamber having said slit seal. CONSTITUTION:A flexible object F to be treated fed from a delivery shaft 8 is fed through a guide roll 9 to a roll guider 27, where the conveying rail of the object F is detected with a detector 29 and the detected signal is sent to a controlling means and energizes an actuator 28 so that the guider 27 may be actuated about point C to prevent the object F from meandering. The object is fed through a slit formed between a seal block 15 supported by an upper case 13 and a lower case 14 to an upstream side preliminary vacuum chamber 2, and fed through guide rolls 25 and 26 to a vacuum treatment chamber 1, wherei it is subjected to plasma treatment. This object F is passed to a downstream side preliminary vacuum chamber 3 similar in structure to the vacuum chamber 2 and a guide roll 10 and wound around a winding shaft 11. |
