| 摘要 |
PURPOSE:To automate working by forming a solid plate-like base from which a frame with a pellicle film can be simply peel off on the inside of a case. CONSTITUTION:A pellicle film 2 stuck to a frame 3 is stuck to the base 1 through an adhesive layer 9 and supported by a strut 6 in the case so that the contact area can be reduced as small as possible. When the upper cover 4 of the case is jumped up under said state while pulling a grip in the right direction, the upper cover 4 is lifted without being slid on a pellicle frame 3 or the base 1. When the base is formed by a plate with high flatness consisting of a transparent material such as glass and quartz is used for the base, a pellicle inspection can be also executed from the lower part of the base 1. Consequently, the working can be automated. |
