| 摘要 |
PURPOSE:To prevent an object to be treated from being damaged by impurities such as dust, by providing a preliminary vacuum chamber and a slit seal having a device for removing static electricity on each of the upstream and downstream sides of a vacuum treatment chamber. CONSTITUTION:A flexible object F to be treated fed from a delivery shaft 8 is passed through a guide roll 9 and a static electricity removal apparatus 27 to remove impurities such as dust and static electricity, passed through a slit seal composed of a seal block 15 of an upper case 13 and a lower case 14 to guide rolls 25 and 26 of a preliminary vacuum chamber 2 decreased in its vacuum stepwise from atmospheric pressure and conveyed to a vacuum treatment chamber 1, where it is subjected to plasma treatment. This object is passed through a downstream side preliminary chamber 3 which is similar in structure to the preliminary vacuum chamber 2, and a guide roll 10 and wound around a winding shaft 11. |
