| 摘要 |
PURPOSE:To prevent the damage of a specimen, by forming a pickup stylus into an axially symmetric shape with respect to the axis of the specimen in a vertical direction and providing an electrode in axially symmetric relation to the center axis of the pickup stylus. CONSTITUTION:A stylus 1 is constituted by sharpening the leading end of the diamond 40 fixed to one end of a piezoelectric element 2 in the direction approaching a specimen 20 and providing capacitance detecting electrodes 41, 42 to the sharpened part. The stylus 1 has such a shape that the same electrodes 41, 42 are bonded to the left and right side surfaces of the diamond having an axially symmetric shape. Since the same electrodes are bonded in a left and right symmetric manner as mentioned above, dielectric flux densities are uniform and equal each other and an apparent electrode 43 is formed on the center axis of the diamond and no phase shift is generated in signal response. Since the leading end of the diamond is sharpened, detection becomes possible before the edge side surface of the surface uneven part of the specimen collides with the stylus.
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