| 摘要 |
PURPOSE:To generate a piezoelectric thin film composite resonator and filter using the elastic vibration by applying etching so as to remove a material being able to be etched on a substrate face except the resonator and filter part. CONSTITUTION:A thin film 2 being able to be etched is bonded to the upper part of the substrate 1. Then a dielectric film 3 is bonded over a proper area, a metallic film 4 is applied thereupon with the same or slightly narrower area, a piezoelectric thin film 5 is applied further thereupon, a metallic film 6 further thereupon and a dielectric film 7 is bonded on the film 6 to form the resonator and filter part. After all or a part of the resonator and filter part of the thin film 2 being able to be etched on the substrate face is removed, the metallic film 8 is bonded to the substrate 1 and a part of the resonator and filter in a way of cross-link. Thus, the characteristic is not deteriorated and the destruction of the resonator due to the cracked resonator part is avoided.
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