| 摘要 |
PURPOSE:To obtain a gas standard body whose mixing ratio is exact, by forming plural capillary grooves whose thickness and length dimensions are different on the surface of a single substrate by etching processing, and forming a gas mixed chip by joining a smoothing plate. CONSTITUTION:On one surface of a square-shaped silicon substrate 31, slender capillary grooves 8', 12', 23' and 25' are formed by an etching processing, and capillary passage resistance paths 8, 12, 23 and 25 are constituted. Also, on the surface of the silicon substrate 31, grooves 111, 122, 110 and 114 for allowing the capillary passage resistance paths to communicate with each inlet port and outlet port are formed, the inlet groove 111 communicating with a carbonic acid gas inlet port 11 has a branch point 6, and the inlet groove 122 communicat ing with an air inlet port 22 has a branch point 21. Also, the outlet groove 111 communicating with an output port 10 has a confluence point 9, and the outlet groove 114 communicating with an outlet port 14 has a confluence point 13. |
