摘要 |
PURPOSE:To obtain a sulfone group-containing plasma polymerization film useful for modifying surfaces of molded products, etc., by carrying out plasma treatment in a blended gas containing a specific alkane, alkene and alkyne compounds and specific sulfur oxide in a specific proportion at a low temperature. CONSTITUTION:The aimed plasma polymerization film obtained by carrying out plasma treatment at a low temperature in a blended gas containing (A) at least one or more of 1-5C alkane, alkene and alkyne compounds (e.g. ethylene) and (B) a compound expressed by the formula SOn (n is an integer of 1-3) (e.g. sulfur oxide) at >=20% molar ratio.
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