| 摘要 |
PURPOSE:To detect a magnetic field existing in the direction vertical to a chip, by detecting a potential difference generated on the side face of the chip, in the direction vertical to the chip and the magnetic field. CONSTITUTION:A current flowing between a chip 1 and a sample 5 is outputted to a servo-circuit 8 from a power source 6. The circuit 8 drives a piezoelectric element 9 in order to keep a current value constant, and adjusts an interval between the tip of the chip 1 and the sample 5. A scanning circuit 12 drives piezoelectric elements 10, 11, executes a scan of a contact probe part, and simultaneously, executes a scan of a luminescent spot of a display 13, as well. Both the scans are synchronized. By displaying a signal from the servo-circuit 8 for showing the displacement quantity of the piezoelectric element 9 as a luminance signal on the display 13, a scan type tunnel electronic microscope image for showing a sample surface shape is obtained. Also, by displaying a signal from a voltmeter 7, a magnetic field distribution is obtained.
|
