| 摘要 |
PURPOSE:To obtain a light intensity distribution corresponding to the characteristics of a semiconductor manufacturing process, on the entrance pupil of a reduction lens, by arranging a removable photodetector on the output side of a secondary light source having a conjugate relation with the entrance pupil of the reduction lens. CONSTITUTION:When a working process treated by a reduction projection aligner is changed, a ball screw 25 is rotated by operating a driving motor 30, and a one-axis table 23 is made to scan. A mercury lamp 2 in a lamp house is chucked to an XYZ stage 33 in order to adjust luminous distribution on a reticle 18 by position adjusting to an ellipsoidal mirror 1. By operating the XYZ stage 33 in Z-direction, the light intensity distribution on the output side of a secondary light source, i.e., a mixer lens group 4 can be controlled. Therefore, by repeating this Z-operation and table scan, the optimum light intensity distribution on a reduction lens entrance pupil for a specified manufacturing process of semiconductor can be obtained. Thereby, a desired light intensity distribution can be set, and the optimum image quality in each working process is obtained by one reduction projection aligner.
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