| 摘要 |
PURPOSE:To improve the registering accuracy, by a method wherein a peak valve of the detected wave form of an automatic registering pattern is made large, by making the sectional structure of the registering pattern V-shaped. CONSTITUTION:On a 0.1-0.5mum thick silicon oxide film 2 on a silicon substrate 1, a registering pattern whose line width is 1-5mum is formed. The sectional structure of the registering pattern 3 is V-shaped, and the inclination angle thetais 10-80 deg.. In such a V-shaped groove pattern 3, the wave form of a reflected light 5 of light irradiation becomes darker at the pattern part than the other part, and the degree of darkness becomes a single mountain type from the pattern end-portion to the central part. Thereby, the automatic registering applying a registering exposing machine is easily and accurately performed. |
