| 摘要 |
PURPOSE:To obtain a heat-dissipative insulating member consisting of a material which replaces an Al2O3 ceramic material by a method wherein an AlN ceramic or an MgO ceramic is used for the insulating member. CONSTITUTION:An AlN ceramic or an MgO ceramic is used for a heat- dissipative insulating member and ones containing 80% or above of AlN or MgO as their main component are each used as the ceramics. The AlN ceramic is about 1/10 and smaller in heat resistance compared with an Al2O3 ceramic and the MgO ceramic is 1/4-1/5. Moreover, both ceramics can be processed in a thickness of 1mm or less and in the case of the MgO ceramic, the ceramic is formed into a thin plate of a thickness of 0.635mm and is used. Thereby, an insulating member; which is superior in a heat dissipation property, insulation properties and a heat resistance; is obtained and the flatness and surface roughness are improved to make the contact of a piezoelectric body to a gold piece uniform and to increase the uniformity of input of an RF power into the whole surface of the piezoelectric body. Moreover, as the ceramic formed into a plate thinner than conventional ones can be used for the insulating member, the heat dissipation property is further improved. |
