| 摘要 |
PURPOSE:To make a circuit comprising an oxide superconductor easily by a method wherein an unnecessary element changing the element composition of a precursor layer or an oxide superconducting layer is implanted in the parts excluding the circuit patterns to be manufactured and the heat treatment is performed to form the superconductor on the parts excluding the parts implanted with the unnecessary element. CONSTITUTION:A precursor layer 2 in the same element composition as that of an oxide superconductor is formed on a substrate 1 to be the circuit substrate of an oxide superconducting circuit. Next, an unnecessary element changing the element composition of the precursor layer 2 is implanted in the parts of the precursor layer 2 excluding the circuit patterns to be manufactured by ion beam process and then heat treatment is performed. By the heat treatment, the parts 2a of the precursor layer 2 implanted with the unnecessary element ion become the insulated parts of the oxide superconducting circuit having no superconducting property. Furthermore, the parts 2b of the precursor layer 2 not implanted with the unnecessary element ion become the stratiform perovskite oxide superconductor to be the conductive parts of circuit. Through these procedures, the oxide superconducting circuit can be made easily. |
