| 摘要 |
PURPOSE:To execute a packing inspection without being influenced by a variance of a character and a pattern on the surface of chip parts, by bringing a chip of a plate to be inspected, to an image pickup, and deriving a dispersion of this image pickup signal, based on a size of a reference image. CONSTITUTION:Non-defective chip parts which become a reference are brought to an image pickup and its image pickup signal is stored in advance in a reference image memory 5. Subsequently, chip parts 1 which have been packed to a base plate 2 to be inspected are brought to an image pickup by a television camera 3. This image signal is digitized and stored in an image memory 4. A dispersion arithmetic means 6 checks a dispersion of an inspected image stored in the image memory 4, based on a size of the reference image stored in the reference image memory 5. Based on its dispersion, a deciding means 7 decides a packing state of the chip parts 1.
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