| 摘要 |
PURPOSE:To improve the chemical resistance of an aluminum nitride sintered body by reacting the carbonate or the like of an alkali metal or alkaline earth metal with the surface of the sintered body at a prescribed temp. to form a layer of aluminum oxide or the like on the surface. CONSTITUTION:The carbonate, nitrate and sulfate of an alkali metal or alkaline earth metal are prepd. One or more kinds of such salts are allowed to react with the surface of an aluminum nitride sintered body at 900-1,300 deg.C to form a layer of aluminum oxide and/or aluminum oxynitride on the surface of the sintered body. Thus, an aluminum nitride sintered body having superior chemical resistance is obtd.
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