发明名称 EXCIMER LASER SYSTEM
摘要 PURPOSE:To enable the preliminary ionization to be performed automatically without making any specific synchronous circuit requiring no external laser device by a method wherein an ultraviolet ray emitter for preliminary ionization is provided on a part of a spiker circuit. CONSTITUTION:With a switch 7 closed, one side 2b of a gap 2 is supplied with the charge potential of a capacitor 4 so that the charge accumulated in the capacitor 4 may be transmitted to another capacitor 5 by the gap 2 making the first spark discharge between the gap sides 2a and 2b. Later, with the switch 7 opened, the charge transmitted to the capacitor 5 is discharged in the closed loop of a coil 3A comprising the capacitor 5 the gap 2 the primary side of a saturable transformer 3 by the gap 2 making the discharge again to induce a pulse voltage on the secondary side of the saturable transformer 3. The ultraviolet rays emitted by the first and the second spark discharges preliminarily ionize the laser gas between 1a and 1b of the main discharge electrodes to attain the preliminary ionization degree making the discharge between the main discharge electrodes by a spiker circuit an even glow discharge. Through these procedures, the preliminary ionization can be performed without using any external laser beams.
申请公布号 JPS63304682(A) 申请公布日期 1988.12.12
申请号 JP19870139579 申请日期 1987.06.03
申请人 NIKON CORP 发明人 HARA HIDEO;KONDO HIROYUKI;KAWAMURA SHINICHIRO;TAKEUCHI HITOSHI;TOKUDA KENSHO
分类号 H01S3/097;H01S3/0971 主分类号 H01S3/097
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