| 摘要 |
PURPOSE:To increase Tc and reduce the dispersion by setting and spattering multiple preset oxides on separate target holders of a spattering device as targets and depositing preset elements on a substrate at the preset mol ratio respectively. CONSTITUTION:Multiple kinds of oxides containing at least one kind of three elements of the Ia group element, IIa group element, and transition element are prepared. These multiple oxides are spattered as targets, and individual elements are evaporated and deposited uniformly on a substrate at the preset mol ratio. Li, Na, K, etc., are used as the Ia group element, Mg, Ca, Sr, Ba, etc., are used as the IIa group element, and Ti, V, Cr, Mn, Fe, Co, Ni, etc., are used as the transition element.
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