| 摘要 |
PURPOSE:To obtain the titled composition guaranteeing a long life even by exhaust of dust mainly containing silicon from a semi conductor production device, by blending a specific alkyl-substituted naphthalene with a specific ethylene-propylene copolymer and a specific succinimide derivative in a specific ratio. CONSTITUTION:The aimed composition comprising (A) 10-22C alkyl-substituted naphthalene, (B) an ethylene-propylene copolymer having 500-2,000 average molecular weight and (C) a succinimide derivative shown by formula I and/or formula II [R and R' are 12-100C alkenyl; R'' is H, 1-100C alkyl or alkenyl (sum of R and R' is 30-200C and sum of R and R'' 12-200C); n is 0-4] in the blending ratio of the component A:B;C of 70-97.0:2.0-15.0:1.0-18.0 by weight. |
