| 摘要 |
PURPOSE:To form uniform magnetic metallic films on the surfaces of cylindrical base bodies with good productivity by disposing two sheets of targets to face each other and disposing the base bodies around the targets in parallel with the central axes of the two targets. CONSTITUTION:Magnets 2 for impressing plasma focusing magnetic fields are fixed on the rear sides of, for example, the targets 1A, 1B facing each other. The above-mentioned targets and magnets are supported by stainless steel holders 3 and are airtightly fixed via insulators 4 to a bell-jar 5. The side faces of the holders are covered by shielding plates 6. 12 Pieces of the Al cylinders 9 are disposed around the targets 1A, 1B in respectively parallel with the central axes of the targets and are made rotatable by means of gears 10. The inside of the jar 5 is evacuated to a vacuum through a discharge port 8. Gaseous Ar is introduced into the jar through an introducing port 7 and sputtering is executed by impressing a negative DC voltage to the holders 3 so that magnetic layers consisting of a Co-Pt alloy, etc., are formed on the surfaces of the cylinders 9.
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