| 摘要 |
PURPOSE:To inhibit the gas used in a vacuum tank from infiltrating into a rotary pump by providing an electrode for attracting the particles ionized with a high-voltage electrode to trap them. CONSTITUTION:When impressing high voltage of e.g. 10kV to the high-voltage (+) electrode plates 5a, electric discharge is caused between the high-voltage electrode plates 5a and the negative (-) or grounded electrode plates 5b. When oil molecules and gaseous molecules are passed through the electron cloud caused by this discharge, these are ionized to positive electric potential and the positive ionized molecules are sucked and attracted to the negative or grounded electrodes 5b and trapped. The gas used in a vacuum tank connected to a connection port 1 is inhibited from infiltrating into a rotary pump connected to a connection port 6 and thereby the rotary pump is protected. Further the oil used in this rotary pump is inhibited from infiltrating into the vacuum tank and thereby the vacuum tank is maintained in a clean and vacuum state.
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