| 摘要 |
PURPOSE:To enable noncontact measurement simply in a relatively large range from several ten to several hundred millimeter, by making a noncontact displacement meter fixed on a slider follow an object with a control circuit. CONSTITUTION:When an object moves in a direction X2 or X1, the displacement thereof is outputted to a control circuit 12 from a conversion circuit A11. When a voltage outputted from the conversion circuit A11 is outside a measuring range, the control circuit 12 moves a noncontact displacement meter 1 to correct position and the position is checked again after a sampling time DELTAt. On the other hand, when the voltage is within the measuring range, distance between the object 6 and the noncontact displacement meter 1 is converted with the conversion circuit A11 into a voltage to be outputted to a computation circuit 13. Moreover, positions of a slider 10 and a head 9 are also fed in parallel through a conversion circuit B15. A computation circuit 13 performs a computation with a computation module 18 at each sampling time DELTAt with the synchronizing of outputs from the conversion circuits A11 and B15 and the results are displayed 14.
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