A SINGLE CRYSTAL WAFER OF LITHIUM TANTALATE

摘要

The inventive x-cut single crystal wafer of lithium tantalate has at least one orientation flat which is formed in such a crystallographic orientation that the plane of the orientation flat is parallel to the (018) plane of the single crystal or parallel to a plane which is parallel to the x-axis and perpendicular to the (018) plane with an allowable deviation of +/-15 DEG . In comparison with conventional wafers provided with an orientation flat in the 112 DEG Y direction, the orientation flat of the inventive wafers can be formed with greatly improved working efficiency for the location of the proper crystallographic orientation. The improved accuracy in the orientation of the orientation flat ensures greatly improved performance of the SAW devices manufactured from the inventive wafers as well as greatly increased yield of acceptable products.