| 摘要 |
<p>A direct-imaging, monochromatic electron microscope includes an objective lens (20) for collecting a substantial portion of emitted electrons from an area across a sample surface (12), a first transfer lens (62) for focusing the electrons into beams, an energy filter (82) receptive of the beams to transit monochromatic beams, and a second transfer lens (102) receptive of the monochromatic beams for refocusing the same through a projection lens (106) to effect an image of the plurality of spots in a projection plane (108). The objective lens is formed of a magnetic toroidal coil having a central hole therein with a dish-shaped magnetically permeable member cupped coaxially over the toroidal coil. The permeable member has a neck portion protruding through the central hole. The sample surface is interposed proximate the objective lens between the objective lens and the energy filter.</p> |
