| 摘要 |
A method for measuring the dimensions of a fine pattern, comprises first measuring a surface area and determining a profile of a displayed pattern image, second, calculating the center of gravity of the pattern image, third, calculating an equivalent diameter of a circular pattern having the same surface area as the pattern image, fourth, calculating a mean value of pattern lengths of lines which all pass through the center of gravity of the pattern image and which intersect the pattern image at two intersecting points; and fifth, comparing the mean value with the equivalent diameter of the circular pattern image. The pattern lengths are defined as distances between the two intersecting points.
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