| 摘要 |
PURPOSE:To select a visual field by an SEM observation and to enable it to be observed by an STM observation, by mounting a scanning stylus mechanism and a specimen roughly moving mechanism of a scanning tunnel electron microscope on an objective lens of a scanning electron microscope SEM. CONSTITUTION:A rigid member 5 supports a scanning stylus 3, a scanning mechanism 4 and a base table 7 of a specimen stage 6 and is mounted on an SEM objective lens 1 through a rubber vibration isolator. Lock mechanisms 8a, 8b are secured to the base table 7. When an SEM observation is effected, the mechanisms 8a, 8b are released and a drive units 6x, 6y are moved to observe a specimen 2. Then, an observation area of the STM is selected, the specimen 2 is approached to the stylus 3 by a drive unit 6z, and the stage 6 is fixed by the mechanisms 8a, 8b. Thus, the STM observation is effected by scanning the stylus 3 by the mechanism 4. By this arrangement, a visual field is selected by a wider SEM observation and observed by an STM of a high magnification ratio to provide a picture image of high performance. |
