| 摘要 |
PURPOSE:To perform the efficient temperature control by performing the feedback control to a power control unit controlling the power of a DC power supply feeding the DC power to a heater that the electric resistance is increased as the temperature rises so that the preset voltage is applied to the heater. CONSTITUTION:The power of a DC power supply 7 feeding the DC power to a heater 4 that the electric resistance is increased as the temperature rises is controlled, and the feedback control is performed to this power control unit 8 so that the preset voltage is applied to the heater 4. Since the heater 4 is heated with the DC power supply 7, the noise generated by the heating with the conventional AC power supply is eliminated, and the heater 4 can be efficiently heated to the extremely high temperature. When the heater 4 attains the high temperature, the temperature is controlled by the voltage control, thus there is no danger that the surface temperature of the heater abruptly rises to the vicinity of the melting point. The stable and accurate temperature control can be thereby performed.
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