| 摘要 |
PURPOSE:To prevent the bulging of a frame edge by an adhesive agent or the rupture from the frame edge by coating the adhesive agent to the side end face of the pellicle frame which is chamfered at the angle intersecting with the side end face and inner side face to be stuck with a pellicle, then extending the pellicle thereto and cutting the film along the outer side face of the frame. CONSTITUTION:The pellicle frame 3 which is chamfered at the angle 1a intersecting with at least the inner side face among the angles intersecting with the side end face and inner side face or outer end face to be stuck with the pellicle film 3 is used and after the adhesive agent 2 is coated on the side end face of the chamfered frame, the pellicle film 3 is extended thereon and is cut along the outer end face of the frame 1. The adhesive agent 2 coated on the side end face of the pellicle frame 1 is thereby bled out to the inside and outside of the frame 1 at the time of extending the pellicle film 3, but the extruded adhesive agent 2 bleeds out to the chamfered part 1a and is absorbed therein and, therefore, the building of the film 3 by the frame edge is obviated; in addition, the rupture of the pellicle film 3 at the frame edge is obviated even if the film 3 oscillates at the time of cleaning by an air blow. |
