发明名称 ANALYSIS ELECTRON MICROSCOPE OBSERVABLE WIDE AND NARROW DOMAIN SIMULTANEOUSLY
摘要 PURPOSE:To make it possible to overlap a wide domain of transmission image and a minute probe irradiation image, and to observe the both images simultaneously, by controlling the focus distance of a focus lens. CONSTITUTION:The focus distance is controlled to obtain a wide domain image and a minute image alternately for a time shorter than the afterglow time of a fluorescent screen where the image is focused. By the control voltage depending on a signal (a) for a focus lens, focus distances for the wide domain image and for the minute image are formed alternately, and the wide domain transmission image and the probe image in a minute domain are overlapped and observed. At the starting and the ending of the focus lens magnetic field variation (b), the beams are taken off from the fluorescent screen by a signal (c) for a focus lens deflecting coil. The minute probe image is exposed on a film during the observation by a signal (d) for an intermediate lens and a signal (e) for a projection lens deflecting coil.
申请公布号 JPS63298949(A) 申请公布日期 1988.12.06
申请号 JP19870133073 申请日期 1987.05.28
申请人 JEOL LTD 发明人 TOMITA TAKESHI;MORI SEIICHIRO
分类号 H01J37/22;H01J37/141;H01J37/252;H01J37/26 主分类号 H01J37/22
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