| 摘要 |
PURPOSE:To allow the user to easily and quickly revise a program by storing a control item possibly to be revised by the user side as the kind or the like into a special storage device as a routine program written in a high-class language. CONSTITUTION:A device program decided depending on the kind of the device is stored in a 1st device program storage device 22 for program storage controlled by a microprocessor 21 and it is described by a high-class language. A program as to the data processing based on the control item changed depending on the hardware of the test equipment, the operation control of a prober including a waver end and rod end, data transfer, collection of result of test and the result of collection of total sum is stored in a 2nd routine program storage device 23 as the utility. An execution routine program such as an interpreter being a specific content to the test equipment is stored in a 3rd execution routine storage device 24. Thus, the program revision attended with the device kind, expansion of test equipment or improvement is facilitated.
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