| 摘要 |
PURPOSE:To draw precisely the pattern of a form having a sharp tip part, by moving a beam linearly on the bisector of an acute angle part of a pattern to be drawn before or after the beam shot, and shotting the pattern. CONSTITUTION:An election beam from an electron gun 1 is converged on a material 7 with convergent lenses 2, 3. A controlling equipment 6 sends the following signals to a scanning signal generating circuit 5; a drawing position signal for an acute triangle pattern, a time giving the exposure quantity by which an edge part is precisely drawn after developing, and a scanning speed signal at which the edge part is irradiated with the beam. The circuit 5 constitues a shot signal for drawing the acute triangle pattern, and delivers it to deflectors 4X, 4Y. Electron beam is made to scan the inside of the acute triangle pattern on the material 7 by the defector 4X, 4Y. After or before the scanning, the equipment 6 sends to the circuit 5 an order to constitute a signal by which the beam scans linearly on the bisector of a tip part of the acute triangle. Thereby, the pattern of a form having a sharp tip part can be obtained.
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